MicroNano integration /
In recent years, micro- and nanotechnologies became key technologies, having a significant effect on the development of new products and production technologies, as well as on novel medical diagnosis and treatment methods. Moreover, due to their enormous potential for new applications, micro- and na...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2004]
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Innovation Aspects of MicroNano Integration
- MicroNano Systems and Device
- MicroNato Devices for Information Technologies
- MicroNano Devices for Biomedial Application
- Metrology and Standards
- Frontiers of MicroNano Fabrication and Engineering.