http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
physics of image formation and microanalysis
Second completely revised and updated edition.
1 online resource (xiv, 527 pages) : illustrations.
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
1. Introduction -- 2. Electron optics of a scanning electron microscope -- 3. Electron scattering and diffusion -- 4. Emission of backscattered and secondary electrons -- 5. Electron detectors and spectrometers -- 6. Image contrast and signal processing -- 7. Electron-beam-induced current and cathodoluminescence -- 8. Special techniques in SEM -- 9. Crystal structure analysis by diffraction -- 10. Elemental analysis and imaging with X-rays.
Includes bibliographical references and index.
Springer series in optical sciences ; v. 45