APA (7th ed.) Citation

NATO Advanced Study Institute on Plasma Processing of Semiconductors Bonas, France, SpringerLink (Online service), North Atlantic Treaty Organization. Scientific Affairs Division, & Williams, P. F. (1997). Plasma processing of semiconductors. Kluwer Academic Publishers.

Chicago Style (17th ed.) Citation

NATO Advanced Study Institute on Plasma Processing of Semiconductors Bonas, France, SpringerLink (Online service), North Atlantic Treaty Organization. Scientific Affairs Division, and P. F. Williams. Plasma Processing of Semiconductors. Dordrecht ; Boston: Kluwer Academic Publishers, 1997.

MLA (9th ed.) Citation

NATO Advanced Study Institute on Plasma Processing of Semiconductors Bonas, France, et al. Plasma Processing of Semiconductors. Kluwer Academic Publishers, 1997.