Plasma-Surface Interactions and Processing of Materials /
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. <br/> The subjects dealt with in the book include: the...
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| Corporate Author: | |
| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands,
1990.
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| Series: | NATO ASI series. Applied sciences ;
176. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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