Future Trends in Microelectronics : Reflections on the Road to Nanotechnology /
Silicon technology has developed along virtually one single line: reducing the minimal size of lithographic features. But has this taken us to the point of diminishing returns? Are we now at a turning point in the logical evolution of microelectronics? Some believe that the semiconductor microelectr...
| Main Author: | Luryi, Serge |
|---|---|
| Corporate Author: | SpringerLink (Online service) |
| Other Authors: | Xu, Jimmy, Zaslavsky, Alex |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands,
1996.
|
| Series: | NATO ASI series. Applied sciences ;
323. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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