rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
  title info:
    title: Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997
  name:
    name part: Garfunkel, Eric.
    role:
      role term: creator
  name:
    name part: Gusev, Evgeni.
  name:
    name part: Vul', Alexander.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: ne
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (520 pages)
  abstract: An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of <3 nm will be required in the near future. Given the importance of ultrathin gate dielectrics, well-focused basic scientific research and aggressive development programs must continue on the silicon oxide, oxynitride, and high K materials on silicon systems, especially in the critical, ultrathin 1-3 nm regime. The main thrust of the present book is a review, at the nano and atomic scale, the complex scientific issues related to the use of ultrathin dielectrics in next-generation Si-based devices. The contributing authors are leading scientists, drawn from academic, industrial and government laboratories throughout the world, and representing such backgrounds as basic and applied physics, chemistry, electrical engineering, surface science, and materials science. Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
  note: edited by Eric Garfunkel, Evgeni Gusev, Alexander Vul'.
  note: Electronic resource.
  subject:
    topic: Optical materials
  subject:
    topic: Surfaces (Physics)
  subject:
    topic: Optical materials
  subject:
    topic: Surfaces (Physics)
  classification: TA1750-1750.22
  classification: 620.11295
  related item:
    title info:
      title: NATO science series. 47
      part number: Series 3
      part name: High technology
  identifier: 9789401150088 (electronic bk.)
  identifier: 9401150087 (electronic bk.)
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: I9W
    record creation date: 121227
    record change date: 20260422164348.9
    record identifier: in00003545636
    language of cataloging:
      language term: eng