APA (7th ed.) Citation

Shaw, D. (1973). Atomic Diffusion in Semiconductors. Springer US.

Chicago Style (17th ed.) Citation

Shaw, D. Atomic Diffusion in Semiconductors. Boston, MA: Springer US, 1973.

MLA (9th ed.) Citation

Shaw, D. Atomic Diffusion in Semiconductors. Springer US, 1973.