The physics of micro/nano-fabrication /
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentati...
| Main Author: | |
|---|---|
| Corporate Author: | |
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer,
1992.
|
| Series: | Microdevices.
|
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Search Result 1
