rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    non sort: The
    title: physics of micro/nano-fabrication
  name:
    name part: Brodie, Ivor.
    role:
      role term: creator
  name:
    name part: Muray, Julius J.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: mau
    date issued: 1992
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xix, 650 pages)
  abstract: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
  note: Ivor Brodie and Julius J. Muray.
  note: Electronic resource.
  note: Includes bibliographical references and indexes.
  subject:
    topic: Microelectronics
  subject:
    topic: Thin-film circuits
  subject:
    topic: Microelectronics
  subject:
    topic: Thin-film circuits
  classification: TK7874 .B725 1992
  classification: 621.381
  related item:
    title info:
      title: Microdevices
  identifier: 9781475767759 (electronic bk.)
  identifier: 1475767757 (electronic bk.)
  identifier: 9781441932211
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: SINTU
    record creation date: 130426
    record change date: 20260422203214.3
    record identifier: in00003544898
    language of cataloging:
      language term: eng