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The physics of micro/nano-fabrication /

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentati...

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Bibliographic Details
Main Author: Brodie, Ivor
Corporate Author: SpringerLink (Online service)
Other Authors: Muray, Julius J.
Format: eBook
Language:English
Published: Boston, MA : Springer, 1992.
Series:Microdevices.
Subjects:
Microelectronics.
Thin-film circuits.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Item Description:Electronic resource.
Physical Description:1 online resource (xix, 650 pages)
Bibliography:Includes bibliographical references and indexes.
ISBN:9781475767759 (electronic bk.)
1475767757 (electronic bk.)