Perspectives, Science and Technologies for Novel Silicon on Insulator Devices /
This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI...
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| Format: | eBook |
| Language: | English |
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Dordrecht :
Springer Netherlands : Imprint : Springer,
2000.
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| Series: | NATO science series. High technology ;
73. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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Published 2000
Conference Proceeding
Book