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|a 9789401142618 (electronic bk.)
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|a Hemment, P. L. F.
|q (Peter L. F.)
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| 245 |
1 |
0 |
|a Perspectives, Science and Technologies for Novel Silicon on Insulator Devices /
|c edited by Peter L.F. Hemment, V.S. Lysenko, A.N. Nazarov.
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| 246 |
3 |
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|a Proceedings of the NATO Advanced Research Workshop, Kiev, Ukraine, 12-15 October 1998
|
| 264 |
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|a Dordrecht :
|b Springer Netherlands :
|b Imprint :
|b Springer,
|c 2000.
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| 300 |
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|a NATO Science Series, Series 3. High Technology, 1388-6576 ;
|v 73
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| 520 |
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|a This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS. <br/> <em>Readership:</em> Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.
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|a Lysenko, V. S.
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|a Nazarov, A. N.
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|a SpringerLink (Online service)
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|a NATO science series.
|n Series 3,
|p High technology ;
|v 73.
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| 856 |
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|u http://proxy.library.tamu.edu/login?url=https://link.springer.com/10.1007/978-94-011-4261-8
|z Connect to the full text of this electronic book
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|a Texas A&M University
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