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Perspectives, Science and Technologies for Novel Silicon on Insulator Devices /

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This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI...

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Bibliographic Details
Main Author: Hemment, P. L. F. (Peter L. F.)
Corporate Author: SpringerLink (Online service)
Other Authors: Lysenko, V. S., Nazarov, A. N.
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands : Imprint : Springer, 2000.
Series:NATO science series. High technology ; 73.
Subjects:
Mechanical engineering.
Computer engineering.
Optical materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS. <br/> <em>Readership:</em> Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.
Item Description:Electronic resource.
Physical Description:1 online resource (368 pages)
ISBN:9789401142618 (electronic bk.)
9401142610 (electronic bk.)