rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Materials & process integration for MEMS
  name:
    name part: Tay, Francis E. H.
    role:
      role term: editor.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource.
  abstract: This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications). MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life.
  note: edited by Francis E.H. Tay.
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Micromechanics
  subject:
    topic: Microstructure
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Micromechanics
  subject:
    topic: Microstructure
  classification: TK7875
  classification: 621.381
  related item:
    title info:
      title: Materials & process integration for MEMS
    identifier: (OCoLC)751517139
  related item:
    title info:
      title: Microsystems (Series) ; v. 9
  identifier: 9781475757910 (electronic bk.)
  identifier: 1475757913 (electronic bk.)
  identifier: 9781441953032
  identifier: 1441953035
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: GW5XE
    record creation date: 131112
    record change date: 20260422153558.5
    record identifier: in00003543873
    language of cataloging:
      language term: eng