Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /

Bibliographic Details

Main Author:	Bhattacharyya, Bijoy (Author)
Corporate Author:	ebrary, Inc
Format:	eBook
Language:	English
Published:	Kidlington, Oxford ; Waltham, MA : William Andrew, an imprint of Elsevier, [2015]
Subjects:	Micromachining. Nanotechnology. Microelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book