The physics and chemistry of SiO₂ and the Si-SiO₂ interface 2 /
| Corporate Authors: | SpringerLink (Online service), Electrochemical Society. Electronics Division (sponsoring body.), Electrochemical Society. Dielectric Science and Technology Division (sponsoring body.), Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface |
|---|---|
| Other Authors: | Helms, C. Robert (Editor), Deal, Bruce E. (Editor) |
| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
New York :
Springer Science+Business Media, LLC,
[1993]
|
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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