APA (7th ed.) Citation

SpringerLink (Online service), Electrochemical Society. Electronics Division, Electrochemical Society. Dielectric Science and Technology Division, Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface, Helms, C. R., & Deal, B. E. (1993). The physics and chemistry of SiO₂ and the Si-SiO₂ interface 2. Springer Science+Business Media, LLC.

Chicago Style (17th ed.) Citation

SpringerLink (Online service), Electrochemical Society. Electronics Division, Electrochemical Society. Dielectric Science and Technology Division, Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface, C. Robert Helms, and Bruce E. Deal. The Physics and Chemistry of SiO₂ and the Si-SiO₂ Interface 2. New York: Springer Science+Business Media, LLC, 1993.

MLA (9th ed.) Citation

SpringerLink (Online service), et al. The Physics and Chemistry of SiO₂ and the Si-SiO₂ Interface 2. Springer Science+Business Media, LLC, 1993.