Microwave discharges : fundamentals and applications /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , |
| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
New York :
Springer Science+Business Media, LLC,
[1993]
|
| Series: | NATO ASI series. Physics ;
v. 302. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Surface Wave Discharges. The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectives / M. Moisan, J. Hubert, J. Margot, G. Sauve and Z. Zakrzewski. Wave Propagation in Bounded Plasmas / C. Boisse-Laporte. Microwave Discharges: Structures and Stability / J. Marec and Ph. Leprince. Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguides / M. Georgieva and A. Shivarova. Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressure / A. B. Sa. Strongly Damped Surface Waves in Plasmas / G. G. Lister. Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Field / I. Zhelyazkov. Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Waves / Yu. M. Aliev
- Microwave Plasma Sources. Surface-Wave Plasma Sources / Z. Zakrzewski, M. Moisan and G. Sauve.
- Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmas / J. Margot and M. Moisan. ECR Plasma Sources / R. Wilhelm. Distributed ECR: Concept, Performances and Perspectives / J. Pelletier. Large Area Planar Microwave Plasmas / A. Ohl. Fabry-Perot-Type-Microwave Resonator / G. Bohm
- Diagnostics. Diagnostics of Microwave Discharges / H. Schluter. Thermal Discharges: Experiments and Diagnostics / D. C. Schram, D. A. Benoy, J. J. Beulens, A. J. M. Buuron, F. H. A. G. Fey, M. J. de Graaf, G. J. Meeusen, R. F. G. Meulenbroeks, J. A. M. van der Mullen, J. M. de Regt, M. C. M. van de Sanden and Z. Qing. Optical Diagnostics in Radiofrequency Glow and Afterglow / S. De Benedictis. Optical Diagnostics for High Electron Density Plasmas / M. C. M. van de Sanden, R. F. G. . Meulenbroeks, J. J. Beulens, A. J. M. Buuron, M. J. de Graaf, G. J. Meeusen, Z. Qing, J. M. de Regt, Gh. Dinescu, D. K. Otorbaev and D. C. Schram.
- Use of Emissive Probes in HF Plasmas / F. M. Dias. Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas / U. Kortshagen
- Modeling. Kinetic Modeling of Microwave Discharges / C. M. Ferreira. Collision Dominated Electron Kinetics in Low and High Frequency Fields / R. Winkler. Power Deposition in Low Pressure Capacitively Coupled RF Discharges / L. C. Pitchford, Ph. Belenguer and J. P. Boeuf. Time Dependent Electron Energy Distribution Functions in Molecular Gases / M. Capitelli, C. Gorse and S. Longo. Excitation Equilibria in Plasmas; A Classification / J. A. M. van der Mullen, D. A. Benoy and F. H. A. G. Fey. Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundaries / J. Ingold
- Light Sources. Applications of Microwave Discharges to High-Power Light Sources / J. Waymouth
- Applications. Semiconductor Processing Applications of Microwave Plasmas / J. Paraszczak and J. Heidenreich.
- Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas / M. R. Wertheimer and L. Martinu. Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Deposition / A. Ricard, A. Gicquel, H. Malvos, H. Michel, S. Bordeleau and J. Hubert. Surface Wave Plasmas in O[subscript 2]-N[subscript 2] Mixtures as Active Species Sources for Surface Treatments / A. Granier. Applications of Distributed Electron Cyclotron Resonance (DECR) to Plasma-Surface Interaction / R. R. Burke. Applications of Microwave Discharges to Elemental Analysis / J. Hubert, R. Sing, D. Boudreau, K. C. Tran, C. Lauzon and M. Moisan. Microwave Methods for the Fabrication of Optical Fibers / E. Rauchle. Diamond Films: Procedures and Parameters / A. Gicquel, E. Anger and C. Heau.