APA (7th ed.) Citation

Nojiri, K. (2015). Dry etching technology for semiconductors. Springer.

Chicago Style (17th ed.) Citation

Nojiri, Kazuo. Dry Etching Technology for Semiconductors. Cham: Springer, 2015.

MLA (9th ed.) Citation

Nojiri, Kazuo. Dry Etching Technology for Semiconductors. Springer, 2015.

Warning: These citations may not always be 100% accurate.