Modeling of chemical vapor deposition of tungsten films /
| Main Author: | |
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| Corporate Author: | |
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Basel ; Boston :
Birkhäuser Verlag,
1993.
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| Series: | Progress in numerical simulation for microelectronics ;
vol. 2. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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