APA (7th ed.) Citation

Kleijn, C. R., & Werner, C. (1993). Modeling of chemical vapor deposition of tungsten films. Birkhäuser Verlag.

Chicago Style (17th ed.) Citation

Kleijn, Chris R., and Christoph Werner. Modeling of Chemical Vapor Deposition of Tungsten Films. Basel ; Boston: Birkhäuser Verlag, 1993.

MLA (9th ed.) Citation

Kleijn, Chris R., and Christoph Werner. Modeling of Chemical Vapor Deposition of Tungsten Films. Birkhäuser Verlag, 1993.