Sputtering by Particle Bombardment II : Sputtering of Alloys and Compounds, Electron and Neuron Sputtering, Surface Topography /
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
1983.
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| Series: | Topics in applied physics ;
52. |
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource. |
| ISBN: | 9783540386599 (electronic bk.) 3540386599 (electronic bk.) |
| ISSN: | 0303-4216 ; |