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Beam effects, surface topography, and depth profiling in surface analysis /

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Czanderna, Alvin Warren, 1930-, Madey, Theodore E., Powell, C. J. (Cedric John)
Format: eBook
Language:English
Published: New York : Plenum Press, [1998]
Series:Methods of surface characterization ; v. 5.
Subjects:
Surfaces (Technology) > Analysis.
Materials > Effect of radiation on.
Electronic books.
Andre fag (naturvidenskab og teknik) > Andre fag
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Cover
  • Contributors
  • Foreword
  • Preface
  • Table of Contents
  • 1. Photon Beam Damage and Charging at Solid Surfaces
  • 1. Introduction
  • 2. Electrostatic Charging of Samples in Photoemission Experiments
  • 3. Energy Scale Calibration
  • 4. The Auger Parameter: Charge-Independent Chemical Identification
  • 5. Photon Damage
  • 6. Closing Comments
  • References
  • 2. Electron Beam Damage at Solid Surfaces
  • 1. Introduction
  • 2. Fundamentals
  • 3. Electron Beam Effects in Auger Surface Analyses
  • 4. Recommendations
  • 5. References
  • 3. Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling
  • 1. Introduction
  • 2. IonBeam ... Solid Interactions
  • 3. Structural Changes Resulting from Ion Beam Bombardment
  • 4. Physical Effects: Ion-Beam-Induced Topography
  • 5. Compositional Changes and Chemical Effects
  • 6. Depth Resolution: Sample, Beam, and Instrumental Effects
  • 7. Combined Beam Effects
  • 8. Applications
  • 9. Summary and Concluding Remarks
  • References
  • Appendix 1. Acronyms and Abbreviations
  • 4. Characterization of Surface Topography
  • 1. Introduction
  • 2. Results Obtainable with Profiling Instruments
  • 3. Stylus Instruments
  • 4. Optical Profiling Techniques
  • 5. Scanned Probe Microscopy
  • 6. Intercomparisons
  • 7. Conclusions
  • References
  • 5. Depth Profiling Using Sputtering Methods
  • 1. Introduction
  • 2. Physical Basis of the Sputtering Process
  • 3. Experimental Aspects
  • 4. Analysis of Sputter Depth Profiles
  • 5. Application of Sputter Depth Profiling to Various Thin-Film Materials
  • 6. Summary and Future Prospects
  • Acknowledgment
  • References.