rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Low-energy ion irradiation of solid surfaces
  name:
    name part: Gnaser, Hubert
    name part: 1953-
    role:
      role term: creator
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: gw
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (viii, 293 pages) : illustrations : digital, HTML and PDF files.
  abstract: The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.
  table of contents: Introduction -- Interaction of low-energy ions with solids -- Sputtering of multicomponent materials -- Ionization processes at surfaces -- Ion bombardment of crystalline semiconductors -- Summary.
  note: Hubert Gnaser.
  note: Electronic resource.
  note: Includes bibliographical references (pages [259]-289) and index.
  subject:
    topic: Solids
    topic: Effect of radiation on
  subject:
    topic: Ion bombardment
  subject:
    topic: Ion bombardment
  subject:
    topic: Solids
    topic: Effect of radiation on
  classification: QC1 .S797 vol. 146
  classification: 539 s 530.4/16
  related item:
    title info:
      title: Low-energy ion irradiation of solid surfaces
    origin info:
      publisher: Berlin ; New York : Springer, ©1999
    identifier: (DLC) 98044834
    identifier: (OCoLC)40104952
  related item:
    title info:
      title: Springer tracts in modern physics ; 146
  identifier: 9783540497738 (electronic bk.)
  identifier: 3540497730 (electronic bk.)
  identifier: 3540650075 (alk. paper)
  identifier: 9783540650072 (alk. paper)
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: BUF
    record creation date: 080401
    record change date: 20260420211742.0
    record identifier: in00003511255
    language of cataloging:
      language term: eng