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physics and chemistry of SiO₂ and the Si-SiO₂ interface
Symposium on the Physics and Chemistry of SiO₂ and the Si-SiO₂ Interface 1988 : Atlanta, Ga.)
1 online resource (xiii, 556 pages) : illustrations
edited by C. Robert Helms and Bruce E. Deal.
"Proceedings of the Symposium on the Physics and Chemistry of SiO₂ and the Si-SiO₂ Interface, held May 15-20, 1988, at the 173rd Meeting of the Electrochemical Society, in Atlanta, Georgia"--Title page verso.
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
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Includes bibliographical references and index.
Symposium on the Physics and Chemistry of SiO₂ and the Si-SiO₂ Interface (1st : 1988 : Atlanta, Ga.).