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The physics of microfabrication /

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Bibliographic Details
Main Author: Brodie, Ivor
Corporate Author: SpringerLink (Online service)
Other Authors: Muray, Julius J.
Format: eBook
Language:English
Published: New York : Plenum Press, [1982]
Subjects:
Microelectronics.
Thin-film circuits.
Microfabrication.
Microélectronique.
Circuits hybrides à couches minces.
Integrierte Schaltung.
Mikroelektronik.
Technologie.
Microelectronic devices > Design & manufacture
Electronic books.
Online Access:Connect to the full text of this electronic book
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by Brodie, Ivor
Published 1982
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