rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Plasma Enhanced Chemical Vapor Deposition on Living Substrates
    sub title: Development, Characterization, and Biological Applications
  name:
    name part: Tsai, Tsung-Chan
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: Staack, David
    role:
      role term: thesis advisor.
  name:
    name part: Texas A & M University
    role:
      role term: degree granting institution.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: txu
    date issued: 2013
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource.
  abstract: This dissertation proposed the idea of "plasma-enhanced chemical vapor deposition on living substrates (PECVD on living substrates)" to bridge the gap between the thin film deposition technology and the biological and living substrates. This study focuses on the establishment of the knowledge and techniques necessary to perform "PECVD on living substrates" and contains three main aspects: development, characterization, and biological applications. First, a PECVD tool which can operate in ambient air and at low temperature was developed using a helium dielectric barrier discharge jet (DBD jet). It was demonstrated that various materials, such as polymeric, metallic, and composite films, can be readily synthesized through this technique. Second, the PMMA and copper films deposited using DBD jets were characterized. High-rate (22 nm/s), low-temperature (39 °C) PMMA deposition was achieved and the film surface morphology can be tailored by altering the discharge power. Conductive copper films with an electrical resistivity lower than 1 x 10⁻⁷ ohm-m were obtained through hydrogen reduction. Both PMMA and copper films can be grown on temperature-sensitive substrates, such as plastics, pork skin, and even fingernail. The electrical, optical, and imaging characterization of the DBD jets was also conducted and several new findings were reported. Multiple short-duration current pulses instead of only one broad pulse per half voltage cycle were observed when a dielectric substrate was employed. Each short-duration current pulse is induced by a leading ionization wave followed by the formation of a plasma channel. Precursor addition further changed the temporal sequence of the pulses. An increase in the power led to a mode change from a diffuse DBD jet to a concentrated one. This mode change showed significant dependence on the precursor type, tube size, and electrode configuration. These findings regarding the discharge characteristics can thus facilitate the development of DB…
  note: by Tsung-Chan Tsai.
  note: "Major Subject: Mechanical Engineering"
  note: Includes vita.
  note: Doctor of Philosophy Texas A & M University 2012 http://hdl.handle.net/1969.1/148233
  note: Includes bibliographical references.
  note: Text (Dissertation)
  subject:
    topic: Major Mechanical Engineering
  subject:
    topic: Plasma medicine
  subject:
    topic: Plasma Physics
  subject:
    topic: Dielectric barrier discharges (DBD)
  subject:
    topic: Plasma jet
  subject:
    topic: Plasma enhanced chemical vapor deposition (PECVD)
  subject:
    topic: Atmospheric pressure
  identifier: http://hdl.handle.net/1969.1/148233
  record info:
    record content source: TXA
    record creation date: 140115
    record change date: 20151206091143.0
    record identifier: in00003431563
    language of cataloging:
      language term: eng