Transmission electron microscopy in micro-nanoelectronics /

Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Claverie, A. (Alain)
Format:	eBook
Language:	English
Published:	London : Hoboken : ISTE, Ltd. ; Wiley, [2013]
Series:	ISTE.
Subjects:	Transmission electron microscopy. Semiconductors. Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

Active Dopant Profiling in the TEM by Off-Axis Electron Holography / David Cooper
Dopant Distribution Quantitative Analysis Using STEM-EELS/EDX Spectroscopy Techniques / Roland Pantel, Germain Servanton
Quantitative Strain Measurement in Advanced Devices: A Comparison Between Convergent Beam Electron Diffraction and Nanobeam Diffraction / Laurent Clement, Dominique Delille
Dark-Field Electron Holography for Strain Mapping / Martin Hytch [and others]
Magnetic mapping using electron holography / Etienne Snoeck, Christophe Gatel
Interdiffusion and chemical reaction at interfaces by TEM/EELS / Sylvie Schamm-Chardon
Characterization of process-induced defects / Nikolay Cherkashin, Alain Claverie
In situ characterization methods in transmission electron microscopy / Aurelein Massebouef
Specimen preparation for semiconductor analysis / David Cooper, Gerard Ben Assayag.