rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Transmission electron microscopy in micro-nanoelectronics
  name:
    name part: Claverie, A. (Alain)
  name:
    name part: ebrary, Inc
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: enk
    date issued: 2013
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource.
  table of contents: Active Dopant Profiling in the TEM by Off-Axis Electron Holography / David Cooper -- Dopant Distribution Quantitative Analysis Using STEM-EELS/EDX Spectroscopy Techniques / Roland Pantel, Germain Servanton -- Quantitative Strain Measurement in Advanced Devices: A Comparison Between Convergent Beam Electron Diffraction and Nanobeam Diffraction / Laurent Clement, Dominique Delille -- Dark-Field Electron Holography for Strain Mapping / Martin Hytch [and others] -- Magnetic mapping using electron holography / Etienne Snoeck, Christophe Gatel -- Interdiffusion and chemical reaction at interfaces by TEM/EELS / Sylvie Schamm-Chardon -- Characterization of process-induced defects / Nikolay Cherkashin, Alain Claverie -- In situ characterization methods in transmission electron microscopy / Aurelein Massebouef -- Specimen preparation for semiconductor analysis / David Cooper, Gerard Ben Assayag.
  note: edited by Alain Claverie.
  note: Electronic resource.
  note: Includes bibliographical references and index.
  subject:
    topic: Transmission electron microscopy
  subject:
    topic: Semiconductors
  classification: QC611 .C384 2013
  classification: 621.38152
  related item:
    title info:
      title: Transmission Electron Microscopy in Micro-nanoelectronics
    name:
      name part: Claverie, Alain.
    origin info:
      publisher: London : Wiley, ©2013
  related item:
    title info:
      title: ISTE
  identifier: 9781118579022 (electronic bk.)
  identifier: 111857902X (electronic bk.)
  identifier: 9781118579039 (electronic bk.)
  identifier: 1118579038 (electronic bk.)
  identifier: 9781118579053
  identifier: 1118579054
  identifier: 1848213670
  identifier: 9781848213678
  identifier: CL0500000277 Safari Books Online
  identifier: https://ebookcentral.proquest.com/lib/tamucs/detail.action
  related item:
    location:
      url: https://ebookcentral.proquest.com/lib/tamucs/detail.action
  record info:
    record content source: NhCcYBP
    record creation date: 121019
    record change date: 20221130133754.2
    record identifier: in00003155839