Cover Image

Journal of microlithography, microfabrication, and microsystems.

Bibliographic Details
New Title:Journal of micro/nanolithography, MEMS, and MOEMS (Online)
Corporate Author: Society of Photo-optical Instrumentation Engineers
Format: Journal
Language:English
Published: [Bellingham, Wash.] : SPIE-The International Society for Optical Engineering, ©2002-©2006.
Subjects:
Microelectronics > Periodicals.
Microlithography > Periodicals.
Microfabrication > Periodicals.
Online Availability: Check for online availability
Description
Published:Began with: Vol. 1, no. 1 (Apr. 2002), ceased with: Vol. 5 (4) (Oct./Dec. 2006).
Item Description:Electronic resource.
Publication Frequency:Quarterly
Format:Mode of access: World Wide Web.
ISSN:1537-1646
1932-5134