A practical guide to optical metrology for thin films /
| Main Author: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2013]
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| Series: | Wiley Online Library.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource (xii, 211 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3527664343 (electronic bk.) 3527664351 9783527664344 (electronic bk.) 9783527664351 |
| DOI: | 10.1002/9783527664344 |