Cover Image

Materials science of thin films : deposition and structure /

Show other versions (6)
Bibliographic Details
Main Author: Ohring, Milton, 1936-
Format: Book
Language:English
Published: New Delhi : Elsevier, [2002]
Edition:2nd ed., Indian ed.
Subjects:
Thin films.
Table of Contents:
  • A review of materials science
  • Vacuum science and technology
  • Thin-film evaporation processes
  • Discharges, plasmas, and ion-surface interactions
  • Plasma and ion beam processing of thin films
  • Chamical vapor deposition
  • Substrate surfaces and thin-film nucleation
  • Epitaxy
  • Film structure
  • Characterixation of thin films and surfaces
  • Interdiffusion, reactions, and transformations in thin films
  • Mechanical properties of thin films.