rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Materials science of thin films
    sub title: deposition and structure
  name:
    name part: Ohring, Milton
    name part: 1936-
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: ii
    date issued: 2002
    edition: 2nd ed., Indian ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xxi, 794 pages : illustrations ; 24 cm.
  table of contents: A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
  note: Milton Ohring.
  note: "This edition has been authorized by Elsevier for sale in the following countries: India, Pakistan, Nepal, Sri Lanka, and Bangladesh"--Verso title page.
  note: Includes bibliographical references and index.
  subject:
    topic: Thin films
  classification: TA418.9.T45 O47 2002b
  related item:
    title info:
      title: Materials science of thin films
    name:
      name part: Ohring, Milton, 1936-
    origin info:
      publisher: San Diego, CA : Academic Press, 2002
      edition: 2nd ed.
    identifier: (OCoLC)162575935
  identifier: 0125249756 (alk. paper)
  identifier: 9780125249751 (alk. paper)
  identifier: 9789381269534 (Indian paperback ed.)
  identifier: 938126953X (Indian paperback ed.)
  record info:
    record content source: TXA
    record creation date: 130222
    record change date: 20151203084208.0
    record identifier: in00002821059
    language of cataloging:
      language term: eng