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Handbook of thin film deposition : techniques, processes, and technologies /

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Seshan, Krishna
Format:	eBook
Language:	English
Published:	Waltham [Mass.] : William Andrew, 2012.
Edition:	3rd ed.
Subjects:	Thin film devices > Design and construction > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc. Chemical vapor deposition > Handbooks, manuals, etc. Electronic books.
Online Access:	Connect to the full text of this electronic book

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