| Tag |
First Indicator |
Second Indicator |
Subfields |
| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00002781043 |
| 006 |
m d |
| 007 |
cr cn||||||||| |
| 008 |
120718s2012 maua obf 001 0 eng d |
| 005 |
20250816213034.4 |
| 020 |
|
|
|z 9781437778731
|
| 020 |
|
|
|z 9781437778748 (e-book)
|
| 035 |
|
|
|a (CaPaEBR)ebr10578531
|
| 040 |
|
|
|a CaPaEBR
|c CaPaEBR
|d UtOrBLW
|
| 050 |
1 |
4 |
|a TK7872.T55
|b H36 2012eb
|
| 245 |
0 |
0 |
|a Handbook of thin film deposition :
|b techniques, processes, and technologies /
|c edited by Krishna Seshan.
|
| 250 |
|
|
|a 3rd ed.
|
| 264 |
|
1 |
|a Waltham [Mass.] :
|b William Andrew,
|c 2012.
|
| 300 |
|
|
|a 1 online resource (xviii, 392 pages) :
|b illustrations (some color)
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
|
| 338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 500 |
|
|
|a Electronic resource.
|
| 650 |
|
0 |
|a Thin film devices
|x Design and construction
|v Handbooks, manuals, etc.
|
| 650 |
|
0 |
|a Thin films
|v Handbooks, manuals, etc.
|
| 650 |
|
0 |
|a Chemical vapor deposition
|v Handbooks, manuals, etc.
|
| 655 |
|
7 |
|a Electronic books.
|2 local
|
| 700 |
1 |
|
|a Seshan, Krishna.
|
| 710 |
2 |
|
|a ebrary, Inc.
|
| 856 |
4 |
0 |
|u https://ebookcentral.proquest.com/lib/tamucs/detail.action?docID=953179
|y Connect to the full text of this electronic book
|t 0
|
| 980 |
|
|
|a 120807
|b 199
|c USD
|e 298.5
|f YBP_EBR0000039956
|g 1
|
| 999 |
f |
f |
|s 57f2caee-6a4b-35f3-9bfe-a7686a2dc804
|i b14fc13d-595c-34c6-ad3e-0d464f595ebb
|t 0
|
| 999 |
|
|
|a MARS
|
| 952 |
f |
f |
|a Texas A&M University
|b College Station
|c Electronic Resources
|d Available Online
|t 0
|e TK7872.T55 H36 2012eb
|h Library of Congress classification
|
| 998 |
f |
f |
|a TK7872.T55 H36 2012eb
|t 0
|l Available Online
|