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Handbook of thin film deposition : techniques, processes, and technologies /

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Bibliographic Details
Corporate Author: ebrary, Inc
Other Authors: Seshan, Krishna
Format: eBook
Language:English
Published: Waltham [Mass.] : William Andrew, 2012.
Edition:3rd ed.
Subjects:
Thin film devices > Design and construction > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Chemical vapor deposition > Handbooks, manuals, etc.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource (xviii, 392 pages) : illustrations (some color)
Bibliography:Includes bibliographical references and index.