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Comprehensive microsystems /

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Provides an exhaustive overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.

Bibliographic Details
Other Authors: Gianchandani, Yogesh B., Tabata, Osamu, 1956-, Zappe, Hans P.
Format: eBook
Language:English
Published: Amsterdam ; Oxford : Elsevier, [2008]
Subjects:
Microelectromechanical systems.
Electronic books.
Databases.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • v. 1. Materials ; Fabrication and packaging ; Electronics and systems design
  • v. 2. Actuation mechanism ; Physical sensing ; Chemical and biological systems
  • v. 3. Optical systems ; Industrial applications ; Emerging topics ; Index.