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Comprehensive microsystems /

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Provides an exhaustive overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.

Bibliographic Details
Other Authors: Gianchandani, Yogesh B., Tabata, Osamu, 1956-, Zappe, Hans P.
Format: eBook
Language:English
Published: Amsterdam ; Oxford : Elsevier, [2008]
Subjects:
Microelectromechanical systems.
Electronic books.
Databases.
Online Access:Connect to the full text of this electronic book
Description
Summary:Provides an exhaustive overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.
Item Description:Electronic resource.
Physical Description:1 online resource (3 volumes) : illustrations (some color)
Bibliography:Includes bibliographical references and index.
ISBN:9780444521903
0444521909