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Industrial ion sources : broadbeam gridless ion source technology /

Bibliographic Details
Main Author: Zhurin, Viacheslav V.
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH, [2012]
Series:Wiley Online Library.
Subjects:
Ion sources.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Front Matter
  • Hall-Current Ion Sources
  • Ion Source and Vacuum Chamber. Influence of Various Effects on Ion Beam Parameters
  • Oscillations and Instabilities in Hall-Current Ion Sources
  • Optimum Operation of Hall-Current Ion Sources
  • Cathode Neutralizers for Ion Sources
  • Industrial Gridless Broad-Beam Ion Source Producers, Problems and the Need for Their Standardization
  • Operation of Industrial Ion Sources with Reactive Gases
  • Ion Beam and Radiation Impact on Substrate Heating
  • Ion Beam Energy and Current
  • Plasma Optical Systems
  • Ion and Plasma Sources for Science and Technology
  • Ion Assist, and its Different Applications
  • Magnetron with Non-Equipotential Cathode
  • Index.