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| 001 |
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| 005 |
20210728124922.0 |
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| 007 |
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| 008 |
120119s2012 gw a ob 001 0 eng d |
| 019 |
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|a 793494055
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| 020 |
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|a 3527635726 (electronic bk.)
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|a 3527635734 (ePub)
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|a 3527635742 (ePDF)
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|a 3527635750 (mobi)
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|a 9783527635726 (electronic bk.)
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| 020 |
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|a 9783527635733 (ePub)
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| 020 |
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|a 9783527635740 (ePDF)
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| 020 |
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|a 9783527635757 (mobi)
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| 020 |
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|z 9783527410293 (print)
|
| 035 |
|
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|a (OCoLC)773301847
|z (OCoLC)793494055
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| 035 |
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|a (OCoLC)ocn773301847
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| 035 |
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|a 4011568
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| 037 |
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|a 10.1002/9783527635726
|b Wiley InterScience
|n http://www3.interscience.wiley.com
|
| 040 |
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|a DG1
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|c DG1
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| 049 |
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|a QC702.3
|b .Z48 2012eb
|
| 082 |
0 |
4 |
|a 541.372
|2 23
|
| 100 |
1 |
|
|a Zhurin, Viacheslav V.
|0 http://id.loc.gov/authorities/names/nb2011032062
|
| 245 |
1 |
0 |
|a Industrial ion sources :
|b broadbeam gridless ion source technology /
|c Viacheslav V. Zhurin.
|
| 264 |
|
1 |
|a Weinheim :
|b Wiley-VCH,
|c [2012]
|
| 264 |
|
4 |
|c ©2012
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| 300 |
|
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|a 1 online resource (xiii, 312 pages) :
|b illustrations
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| 336 |
|
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 500 |
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|a Electronic resource.
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 505 |
0 |
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|a Front Matter -- Hall-Current Ion Sources -- Ion Source and Vacuum Chamber. Influence of Various Effects on Ion Beam Parameters -- Oscillations and Instabilities in Hall-Current Ion Sources -- Optimum Operation of Hall-Current Ion Sources -- Cathode Neutralizers for Ion Sources -- Industrial Gridless Broad-Beam Ion Source Producers, Problems and the Need for Their Standardization -- Operation of Industrial Ion Sources with Reactive Gases -- Ion Beam and Radiation Impact on Substrate Heating -- Ion Beam Energy and Current -- Plasma Optical Systems -- Ion and Plasma Sources for Science and Technology -- Ion Assist, and its Different Applications -- Magnetron with Non-Equipotential Cathode -- Index.
|
| 588 |
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|a Description based on print version record.
|
| 650 |
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0 |
|a Ion sources.
|0 http://id.loc.gov/authorities/subjects/sh85067808
|
| 655 |
|
7 |
|a Electronic books.
|2 local
|
| 776 |
0 |
8 |
|i Print version:
|a Zhurin, Viacheslav V.
|t Industrial ion sources.
|d Weinheim : Wiley-VCH ;, c2012
|z 9783527410293
|w (OCoLC)767863944
|
| 830 |
|
0 |
|a Wiley Online Library.
|
| 856 |
4 |
0 |
|u http://proxy.library.tamu.edu/login?url=https://dx.doi.org/10.1002/9783527635726
|z Connect to the full text of this electronic book
|t 0
|
| 948 |
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|a cataloged
|b h
|c 2012/8/16
|d c
|e jlanham
|f 3:29:07 pm
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|t 0
|
| 952 |
f |
f |
|a Texas A&M University
|b College Station
|c Electronic Resources
|d Available Online
|t 0
|e QC702.3 .Z48 2012eb
|h Library of Congress classification
|
| 998 |
f |
f |
|a QC702.3 .Z48 2012eb
|t 0
|l Available Online
|