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Ceramic thick films for MEMS and microdevices /

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The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical,...

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Bibliographic Details
Main Author: Dorey, Robert A.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Norwich, N.Y. : William Andrew ; 2011.
Series:Micro and nano technologies series
Subjects:
Thick-film circuits > Design and construction.
Microelectromechanical systems > Design and construction.
Nanoelectronics.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Integration and applications
  • Routes to thick films
  • Thick film deposition techniques
  • Microstructure-property relationships
  • Pattering and structuring
  • Houston, we have a problem: Thick film troubleshooting
  • Recipes and techniques.