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Microfabrication for industrial applications /

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Bibliographic Details
Main Author: Luttge, Regina
Format: Book
Language:English
Published: Amsterdam ; Boston : Elsevier, [2011]
Series:Micro & nano technologies.
Subjects:
Manufacturing processes.
Microfabrication.
Description
Physical Description:xvii, 289 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9780815515821 (hbk.)
0815515820 (hbk.)