Handbook of cleaning in semiconductor manufacturing : fundamentals and applications /

Bibliographic Details
Main Author:	Reinhardt, Karen A.
Other Authors:	Reidy, Richard F.
Format:	eBook
Language:	English
Published:	Salem : Scrivener ; Hoboken : John Wiley & Sons, Inc., [2011]
Series:	Wiley online library.
Subjects:	Semiconductors > Surfaces > Cleaning. Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Electronic resource.
Physical Description:	1 online resource (xxii, 592 pages)
Bibliography:	Includes bibliographical references and index.
ISBN:	9781118071748 (electronic bk.) 1118071743 (electronic bk.)