APA (7th ed.) Citation

Reinhardt, K. A., & Reidy, R. F. (2011). Handbook of cleaning in semiconductor manufacturing: Fundamentals and applications. John Wiley & Sons, Inc..

Chicago Style (17th ed.) Citation

Reinhardt, Karen A., and Richard F. Reidy. Handbook of Cleaning in Semiconductor Manufacturing: Fundamentals and Applications. Salem : Scrivener ; Hoboken: John Wiley & Sons, Inc., 2011.

MLA (9th ed.) Citation

Reinhardt, Karen A., and Richard F. Reidy. Handbook of Cleaning in Semiconductor Manufacturing: Fundamentals and Applications. John Wiley & Sons, Inc., 2011.