Ion implantation technology 2010 : 18th International Conference on Ion Implantation Technology, IIT 2010, Kyoto, Japan, 6-11 June 2010 /
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Melville, N.Y. :
American Institute of Physics,
[2010]
|
| Series: | AIP conference proceedings ;
no. 1321. |
| Subjects: |
| Physical Description: | xiv, 518 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and author index. |
| ISBN: | 9780735408760 0735408769 |
| ISSN: | 0094-243X ; |