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MEMS materials and processes handbook /

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Ghodssi, Reza, Lin, Pinyen
Format: eBook
Language:English
Published: New York ; London : Springer, 2010.
Series:MEMS reference shelf.
Subjects:
Microelectromechanical systems > Materials.
Microelectromechanical systems.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource.
ISBN:0387473181 (electronic bk.)
9780387473185 (electronic bk.)
DOI:10.1007/978-0-387-47318-5