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Principles of microelectromechanical systems /

Bibliographic Details
Main Author: Lee, Ki Bang
Format: eBook
Language:English
Published: Hoboken, N.J. : Wiley, 2011.
Series:Wiley online library.
Subjects:
Microelectromechanical systems.
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics.
TECHNOLOGY & ENGINEERING / Electronics / Digital.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource (xii, 667 pages) : illustrations
Bibliography:Includes bibliographical references (pages 657-659) and index.
ISBN:9780470649671 (electronic bk.)
0470649674 (electronic bk.)
9780470649664 (electronic bk.)
0470649666 (electronic bk.)