Optical lithography : here is why /

Computational lithography /
by: Ma, Xu, 1983-
Published: (2010)

Computational lithography /
by: Ma, Xu, 1983-
Published: (2010)

Selected papers on resolution enhancement techniques in optical lithography /
Published: (2004)

Excimer laser lithography /
by: Jain, Kanti, 1948-
Published: (1990)

Etching in microsystem technology /
by: Köhler, J. M. (J. Michael), 1956-
Published: (1999)

Ätzverfahren für die Mikrotechnik /
by: Köhler, J. M. (J. Michael), 1956-
Published: (1998)

Lithography process control /
by: Levinson, Harry J.
Published: (1999)

Advanced processes for 193-nm immersion lithography /
by: Wei, Yayi
Published: (2009)

Lithography process control /
by: Levinson, Harry J.
Published: (1999)

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /
Published: (1990)

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California /
Published: (1990)

Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 /
Published: (1983)

Optical/laser microlithography : 2-4 March 1988, Santa Clara, California /
Published: (1988)

Photon sources for lithography and metrology /
Published: (2023)

Chemistry and lithography /
by: Okoroanyanwu, Uzodinma
Published: (2020)

Laser microfabrication : thin film processes and lithography /
Published: (1989)

Principles of lithography /
by: Levinson, Harry J.
Published: (2019)

Optical/laser microlithography II : 1-3 March 1989, San Jose, California /
Published: (1989)

Scanning probe lithography : fundamentals, materials, and applications /
by: Ryu, Yu Kyoung, et al.
Published: (2023)

Optical/laser microlithography : 3-5 March 1993, San Jose, California /
Published: (1993)

Optical/laser microlithography III : 7-9 March 1990, San Jose, California /
Published: (1990)

Optical/laser microlithography V : 11-13 March 1992, San Jose, California /
Published: (1992)

Optical/laser microlithography IV : 6-8 March 1991, San Jose, California /
Published: (1991)

Molecular theory of lithography /
by: Okoroanyanwu, Uzodinma
Published: (2015)

Chemistry and lithography /
by: Okoroanyanwu, Uzodinma
Published: (2020)

Molecular theory of lithography /
by: Okoroanyanwu, Uzodinma
Published: (2015)

Fundamental principles of optical lithography : the science of microfabrication /
by: Mack, Chris A.
Published: (2007)

Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California /
Published: (1990)

Materials and Processes for Next Generation Lithography.
Published: (2016)

Optical/laser microlithography VII : 2-4 March 1994, San Jose, California /
Published: (1994)

Lasers in microlithography : 2-3 March 1987, Santa Clara, California /
Published: (1987)

Field guide to optical lithography /
by: Mack, Chris A.
Published: (2006)

Advanced processes for 193-nm immersion lithography /
by: Wei, Yayi
Published: (2009)

Microlithography fundamentals in semiconductor devices and fabrication technology /
by: Nonogaki, Saburo, 1930-
Published: (1998)

Dry etching for microelectronics /
Published: (1984)

Plasma etching : fundamentals and applications /
by: Sugawara, M. (Minoru)
Published: (1998)