rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Optical lithography
    sub title: here is why
  name:
    name part: Lin, Burn Jeng
    name part: 1942-
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: wau
    date issued: 2009
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiv, 477 pages : illustrations ; 26 cm.
  note: Burn J. Lin.
  note: Includes bibliographical references and index.
  subject:
    topic: Microlithography
  subject:
    topic: Semiconductors
    topic: Etching
  subject:
    topic: Lasers
    topic: Industrial applications
  classification: TK7872.M3 .L56 2009
  classification: 621.3815/31
  identifier: 9780819475602
  identifier: 0819475602
  identifier: 2009049350
  record info:
    record content source: DLC
    record creation date: 091124
    record change date: 20151201114556.0
    record identifier: in00002585225