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Optical lithography : here is why /

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Bibliographic Details
Main Author: Lin, Burn Jeng, 1942-
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, [2010]
Subjects:
Microlithography.
Semiconductors > Etching.
Lasers > Industrial applications.
Description
Item Description:Includes bibliographical references and index.
Physical Description:xiv, 477 pages : illustrations ; 26 cm.
ISBN:9780819475602
0819475602